![]() H02J- CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER SYSTEMS FOR STORING ELECTRIC ENERGY.H02- GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER.H01L21/6833- Details of electrostatic chucks. ![]() H01L21/6831- Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks.H01L21/683- Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components Apparatus not specifically provided for elsewhere for supporting or gripping.H01L21/67103- Apparatus for thermal treatment mainly by conduction.H01L21/67098- Apparatus for thermal treatment.H01L21/67011- Apparatus for manufacture or treatment.H01L21/67005- Apparatus not specifically provided for elsewhere.H01L21/67- Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components Apparatus not specifically provided for elsewhere.H01L21/00- Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof.H01L- SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10.H01J37/32174- Circuits specially adapted for controlling the RF discharge.H01F27/28- Coils Windings Conductive connections.H01J37/32623- Mechanical discharge control means.H01J37/32431- Constructional details of the reactor.H01J37/32082- Radio frequency generated discharge.H01J37/32009- Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g.for the purpose of examination or processing thereof H01J37/00- Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g.H01J- ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS.H01F27/00- Details of transformers or inductances, in general.H01F- MAGNETS INDUCTANCES TRANSFORMERS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES.Assignors: PEASE, JOHN, BENJAMIN, NEIL MARTIN PAUL, ANDERSON, THOMAS, MOPIDEVI, HEMA SWAROOP Priority to PCT/US2018/061902 priority patent/WO2019108434A1/en Priority to KR1020207018813A priority patent/KR20200084367A/en Priority to CN201880077749.2A priority patent/CN111434022A/en Publication of US20190164729A1 publication Critical patent/US20190164729A1/en Application granted granted Critical Publication of US10460914B2 publication Critical patent/US10460914B2/en Status Active legal-status Critical Current Adjusted expiration legal-status Critical Links Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by Lam Research Corp filed Critical Lam Research Corp Priority to US15/828,258 priority Critical patent/US10460914B2/en Assigned to LAM RESEARCH CORPORATION reassignment LAM RESEARCH CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Original Assignee Lam Research Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Benjamin Current Assignee (The listed assignees may be inaccurate. ( en Inventor Hema Swaroop Mopidevi John Pease Thomas W. ![]() Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Granted Application number US15/828,258 Other versions US10460914B2 Google Patents US20190164729A1 - Ferrite Cage RF Isolator For Power Circuitry US20190164729A1 - Ferrite Cage RF Isolator For Power Circuitry
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